Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8088632 | Elemental analysis method and semiconductor device manufacturing method | Satoshi Shibata, Hisako Kamiyanagi, Tetsuyuki Okano | 2012-01-03 |
| 7560367 | Method for thermal processing with a RTP process using temperature spaces in radiation equilibrium | Satoshi Shibata | 2009-07-14 |
| 7319061 | Method for fabricating electronic device | Satoshi Shibata, Hisako Kamiyanagi, Emi Kanazaki | 2008-01-15 |
| 7282416 | Method for fabricating electronic device | Satoshi Shibata, Hisako Kamiyanagi, Emi Kanazaki | 2007-10-16 |
| 7103271 | Light irradiation heat treatment method and light irradiation heat treatment apparatus | Emi Kanazaki, Satoshi Shibata | 2006-09-05 |
| 7037733 | Method for measuring temperature, annealing method and method for fabricating semiconductor device | Satoshi Shibata, Junji Hirase, Tatsuo Sugiyama, Emi Kanasaki, Yasushi Naito | 2006-05-02 |