Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11781246 | Silicon carbide single crystal substrate | Kyoko Okita, Takashi Sakurada, Shunsaku UETA, Sho SASAKI, Naoki KAJI +2 more | 2023-10-10 |
| 11535953 | Silicon carbide single crystal substrate | Kyoko Okita, Takashi Sakurada, Shunsaku UETA, Sho SASAKI, Naoki KAJI +2 more | 2022-12-27 |
| 8920565 | Metalorganic chemical vapor deposition reactor | Masaki Ueno | 2014-12-30 |
| 8906162 | Metal organic chemical vapor deposition equipment | Masaki Ueno, Toshio Ueda | 2014-12-09 |
| 8628616 | Vapor-phase process apparatus, vapor-phase process method, and substrate | Toshio Ueda, Toshiyuki Kuramoto, Masaki Ueno | 2014-01-14 |
| 8349083 | Vapor-phase process apparatus, vapor-phase process method, and substrate | Toshio Ueda, Toshiyuki Kuramoto, Masaki Ueno | 2013-01-08 |
| 8349403 | Vapor-phase process apparatus, vapor-phase process method, and substrate | Toshio Ueda, Toshiyuki Kuramoto, Masaki Ueno | 2013-01-08 |
| 8120012 | Group III nitride white light emitting diode | Soo Jin Chua, Peng Chen, Zhen Chen | 2012-02-21 |
| 7387678 | GaN substrate and method of fabricating the same, nitride semiconductor device and method of fabricating the same | Katsushi Akita, Masahiro Nakayama, Masaki Ueno, Kouhei Miura, Takashi Kyono | 2008-06-17 |
| 6841274 | GaN single-crystal substrate, nitride type semiconductor epitaxial substrate, nitride type semiconductor device, and methods of making the same | Masaki Ueno, Soo Jin Chua, Peng Chen | 2005-01-11 |
| 6142663 | Temperature measuring method for semiconductor wafers and processing apparatus | — | 2000-11-07 |