Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6428399 | Polishing apparatus for polishing a hard material-coated wafer | Keiichiro Tanabe, Yuichiro Seki, Naoji Fujimori | 2002-08-06 |
| 6193585 | Method of polishing a hard material-coated wafer | Keiichiro Tanabe, Yuichiro Seki, Naoji Fujimori | 2001-02-27 |
| 5855998 | Hard material-coated wafer, method of making same, polishing apparatus and polishing method of hard material-coated wafer | Keiichiro Tanabe, Yuichiro Seki, Naoji Fujimori | 1999-01-05 |