Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11820735 | Salt, acid generator, resist composition and method for producing resist pattern | Koji Ichikawa | 2023-11-21 |
| 11739056 | Carboxylate, carboxylic acid generator, resist composition and method for producing resist pattern | Tatsuro Masuyama, Koji Ichikawa | 2023-08-29 |
| 11740555 | Resist composition and method for producing resist pattern | Satoshi Yamaguchi, Koji Ichikawa | 2023-08-29 |
| 11681220 | Resist composition and method for producing resist pattern | Satoshi Yamaguchi, Koji Ichikawa | 2023-06-20 |
| 11556056 | Salt, acid generator, resist composition and method for producing resist pattern | Mitsuyoshi Ochiai, Koji Ichikawa | 2023-01-17 |
| 11550218 | Salt, acid generator, resist composition and method for producing resist pattern | Koji Ichikawa | 2023-01-10 |
| 11467490 | Salt, acid generator, resist composition and method for producing resist pattern | Tatsuro Masuyama, Koji Ichikawa | 2022-10-11 |
| 11378883 | Salt, acid generator, resist composition and method for producing resist pattern | Koji Ichikawa | 2022-07-05 |
| 10359700 | Salt, acid generator, photoresist composition and process of producing photoresist pattern | Satoshi Yamamoto, Koji Ichikawa | 2019-07-23 |
| 9951159 | Compound, resin, resist composition and method for producing resist pattern | Singo Fujita, Koji Ichikawa | 2018-04-24 |
| 9771346 | Salt, acid generator, resist composition and method for producing resist pattern | Takayuki Miyagawa, Koji Ichikawa | 2017-09-26 |
| 9645490 | Salt, acid generator, photoresist composition, and method for producing photoresist pattern | Koji Ichikawa | 2017-05-09 |
| 9348221 | Salt and photoresist composition comprising the same | Koji Ichikawa, Takahiro Yasue | 2016-05-24 |
| 9274421 | Salt and photoresist composition comprising the same | Koji Ichikawa, Masafumi Yoshida | 2016-03-01 |
| 9260407 | Salt and photoresist composition comprising the same | Koji Ichikawa | 2016-02-16 |
| 9051247 | Salt, photoresist composition, and method for producing photoresist pattern | Koji Ichikawa | 2015-06-09 |
| 8921029 | Resist composition and method for producing resist pattern | Koji Ichikawa, Shingo Fujita | 2014-12-30 |
| 8852846 | Salt and photoresist composition comprising the same | Koji Ichikawa | 2014-10-07 |
| 8846294 | Photoresist composition | Koji Ichikawa, Satoshi Yamaguchi | 2014-09-30 |
| 8663900 | Resist composition and method for producing resist pattern | Koji Ichikawa, Shingo Fujita | 2014-03-04 |
| 8617790 | Photoresist composition and method for producing photoresist pattern | Koji Ichikawa, Shingo Fujita | 2013-12-31 |
| 8420294 | Salt and photoresist composition comprising the same | Koji Ichikawa, Shingo Fujita | 2013-04-16 |