Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11681218 | Compound, resist composition and method for producing resist pattern | Tatsuro Masuyama, Koji Ichikawa | 2023-06-20 |
| 10571805 | Resist composition | Yuki SUZUKI, Koji Ichikawa | 2020-02-25 |
| 10073343 | Non-ionic compound, resin, resist composition and method for producing resist pattern | Tatsuro Masuyama, Koji Ichikawa | 2018-09-11 |
| 9869930 | Compound, resin, resist composition and method for producing resist pattern | Tatsuro Masuyama, Koji Ichikawa | 2018-01-16 |
| 9791776 | Resist composition and method for producing resist pattern | Koji Ichikawa, Takahiro Yasue | 2017-10-17 |
| 9563125 | Resist composition and method for producing resist pattern | Tatsuro Masuyama, Koji Ichikawa | 2017-02-07 |
| 9428485 | Salt, photoresist composition and method for producing photoresist pattern | Tatsuro Masuyama | 2016-08-30 |
| 9268226 | Resin, resist composition and method for producing resist pattern | Koji Ichikawa, Akira Kamabuchi | 2016-02-23 |
| 9051251 | Salt, photoresist composition and method for producing photoresist pattern | Tatsuro Masuyama | 2015-06-09 |
| 8940473 | Resist composition and method for producing resist pattern | Koji Ichikawa, Satoshi Yamamoto | 2015-01-27 |
| 8835095 | Resist composition and method for producing resist pattern | Koji Ichikawa, Hiromu Sakamoto | 2014-09-16 |
| 8802352 | Salt, photoresist composition and method for producing photoresist pattern | Koji Ichikawa, Isao Yoshida | 2014-08-12 |
| 8778594 | Resist composition and method for producing resist pattern | Koji Ichikawa, Hiromu Sakamoto | 2014-07-15 |
| 8753795 | Photoresist composition | Koji Ichikawa, Hiromu Sakamoto | 2014-06-17 |
| 8753796 | Photoresist composition | Koji Ichikawa, Hiromu Sakamoto | 2014-06-17 |
| 8741544 | Salt, photoresist composition and method for producing photoresist pattern | Isao Yoshida, Koji Ichikawa | 2014-06-03 |
| 8697882 | Compound, resin and photoresist composition | Hyungjoo Kim, Akira Kamabuchi | 2014-04-15 |
| 8685619 | Resist composition and method for producing resist pattern | Koji Ichikawa, Satoshi Yamamoto | 2014-04-01 |
| 8592129 | Resin, resist composition and method for producing resist pattern | Koji Ichikawa, Akira Kamabuchi | 2013-11-26 |
| 8304164 | Photoresist composition | Tatsuro Masuyama, Masahiko Shimada | 2012-11-06 |