Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6569693 | Method for fabricating epitaxial substrate | Masahiko Hata | 2003-05-27 |
| 4976216 | Apparatus for vapor-phase growth | Takayoshi Maeda, Masahiko Hata, Noboru Fukuhara, Hiroaki Takata | 1990-12-11 |