Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12320034 | Method of heat-treating silicon wafer using lateral heat treatment furnace | — | 2025-06-03 |
| 12183600 | Method of determination of pretreatment conditions of heat treatment furnace, method of pretreatment of heat treatment furnace, heat treatment device, and manufacturing method and manufacturing device of heat-treated semiconductor wafer | — | 2024-12-31 |