Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12107018 | Method of measuring concentration of Fe in p-type silicon wafer and SPV measurement apparatus | Shinya Fukushima | 2024-10-01 |
| 11387151 | Method of measuring concentration of Fe in p-type silicon wafer and SPV measurement apparatus | Shinya Fukushima | 2022-07-12 |
| 8339593 | System and method of two-stepped laser scattering defect inspection | Eiji Kamiyama, Kazuhiro Yamamoto, Kenji Aoki | 2012-12-25 |