Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7803228 | Process for producing high-resistance silicon wafers and process for producing epitaxial wafers and SOI wafers | Shinsuke Sadamitsu, Hiroyuki Takao, Masataka Hourai | 2010-09-28 |
| 7621996 | Silicon wafer and method for producing same | — | 2009-11-24 |
| 7560163 | Silicon wafer and method for producing same | — | 2009-07-14 |
| 7507640 | Method for producing silicon wafer | — | 2009-03-24 |
| 7244306 | Method for measuring point defect distribution of silicon single crystal ingot | Jun Furukawa | 2007-07-17 |
| 7074271 | Method of identifying defect distribution in silicon single crystal ingot | Jun Furukawa, Kazuhiro Harada | 2006-07-11 |