Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7654883 | Polishing apparatus, polishing head and polishing method | Masamitsu Kitahashi, Toshiyuki Kamei, Hidetoshi Takeda, Hiroyuki Tokunaga | 2010-02-02 |
| 7507148 | Polishing apparatus, polishing head and polishing method | Masamitsu Kitahashi, Toshiyuki Kamei, Hidetoshi Takeda, Hiroyuki Tokunaga | 2009-03-24 |