Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786525 | Apparatus for processing semiconductor wafers, in particular for carrying out a polymers removal process step | Dario Tenaglia | 2017-10-10 |
| 9385011 | Apparatus for processing semiconductor wafers, in particular for carrying out a polymers removal process step | Dario Tenaglia | 2016-07-05 |