Issued Patents All Time
Showing 51–56 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6331444 | Method for manufacturing integrated devices including electromechanical microstructures, without residual stress | Paolo Ferrari, Benedetto Vigna, Laura Maria Castoldi, Marco Ferrera | 2001-12-18 |
| 6209394 | Integrated angular speed sensor device and production method thereof | Paolo Ferrari, Benedetto Vigna, Aurea Cuccia, Marco Ferrera | 2001-04-03 |
| 6197655 | Method for manufacturing integrated structures including removing a sacrificial region | Marco Ferrera, Laura Maria Castoldi, Ilaria Gelmi | 2001-03-06 |
| 6184052 | Process for manufacturing high-sensitivity capacitive and resonant integrated sensors, particularly accelerometers and gyroscopes, and sensors made therefrom | Benedetto Vigna, Paolo Ferrari, Marco Ferrera | 2001-02-06 |
| 6109106 | Process for manufacturing high-sensitivity accelerometric and gyroscopic integrated sensors, and sensor thus produced | Paolo Ferrari, Benedetto Vigna, Marco Ferrera | 2000-08-29 |
| 6090638 | Process for manufacturing high-sensitivity capacitive and resonant integrated sensors, particularly accelerometers and gyroscopes, and sensors made therefrom | Benedetto Vigna, Paolo Ferrari, Marco Ferrera | 2000-07-18 |