Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7335584 | Method of using SACVD deposition and corresponding deposition reactor | — | 2008-02-26 |
| 6656855 | Deposition method of dielectric films having a low dielectric constant | — | 2003-12-02 |
| 6551949 | Deposition method of dielectric films having a low dielectric constant | — | 2003-04-22 |