Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6283834 | Diaphragm-support disc for a polishing machine and method of operating a polishing machine | — | 2001-09-04 |
| 6254457 | Process for polishing wafers of integrated circuits | Emmanuel Perrin, Frédéric Robert, Henri Banvillet | 2001-07-03 |