Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12330192 | POD cleaning device | Young-soo Park, Ki-Man Lee | 2025-06-17 |
| 12251736 | Pod cleaning process | Young-soo Park, Ki-Man Lee | 2025-03-18 |
| 12246361 | Pod cleaning chamber | Young-soo Park, Ki-Man Lee | 2025-03-11 |
| 11097320 | FOUP cleaning device and FOUP cleaning method | Young-soo Park, Oh Hyeong Kweon, Dong Keun Jung | 2021-08-24 |