HK

Herbert Kegel

SG Steag Rtp Systems Gmbh: 1 patents #20 of 43Top 50%
📍 Blaustein, DE: #112 of 216 inventorsTop 55%
Overall (All Time): #3,612,530 of 4,157,543Top 90%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6051512 Apparatus and method for rapid thermal processing (RTP) of a plurality of semiconductor wafers Helmut Sommer, Manuela Zwissler 2000-04-18