Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6051512 | Apparatus and method for rapid thermal processing (RTP) of a plurality of semiconductor wafers | Helmut Sommer, Manuela Zwissler | 2000-04-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6051512 | Apparatus and method for rapid thermal processing (RTP) of a plurality of semiconductor wafers | Helmut Sommer, Manuela Zwissler | 2000-04-18 |