Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6706121 | Device and method for the treatment of semiconductor wafers | Manfred Schenkl, Robert S. Pesce, Uwe Muller | 2004-03-16 |
| 6607604 | Method and apparatus for treating substrates | — | 2003-08-19 |
| 6352084 | Substrate treatment device | — | 2002-03-05 |
| 6257255 | Substrate treatment device | — | 2001-07-10 |
| 6240938 | Device for treating substrates in a fluid container | — | 2001-06-05 |
| 6189552 | Substrate processing device | — | 2001-02-20 |
| 5992431 | Device for treating substrates in a fluid container | Martin Weber | 1999-11-30 |
| 5921257 | Device for treating substrates in a fluid container | Martin Weber | 1999-07-13 |