Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6805754 | Device and method for processing substrates | Andreas Steinrücke | 2004-10-19 |
| 6523552 | Facility for treating objects in a process tank | — | 2003-02-25 |
| 6488987 | Apparatus and method for processing substrates | — | 2002-12-03 |
| 6205292 | Fluid heater | Andreas Steinrücke | 2001-03-20 |