Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8338301 | Slurry-free chemical mechanical planarization (CMP) of engineered germanium-on-silicon wafers | Sang M. Han, Darin Leonhardt | 2012-12-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8338301 | Slurry-free chemical mechanical planarization (CMP) of engineered germanium-on-silicon wafers | Sang M. Han, Darin Leonhardt | 2012-12-25 |