Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10727034 | Magnetic force release for sputtering sources with magnetic target materials | Patrick Lawrence Morse | 2020-07-28 |
| 10699885 | Dual power feed rotary sputtering cathode | Patrick Lawrence Morse | 2020-06-30 |
| RE46599 | Sputtering apparatus | William A. Meredith, Jr. | 2017-11-07 |
| 9418823 | Sputtering apparatus | Patrick Lawrence Morse, John R. German | 2016-08-16 |
| 9406487 | Plasma enhanced chemical vapor deposition (PECVD) source | Patrick Lawrence Morse, William A. Meredith, Jr., John R. German, Michelle Lynn Neal | 2016-08-02 |
| 9312108 | Sputtering apparatus | Patrick Lawrence Morse, John R. German, William A. Meredith, Jr. | 2016-04-12 |
| 8900428 | Sputtering apparatus | William A. Meredith, Jr. | 2014-12-02 |
| 8182662 | Rotary cathode for magnetron sputtering apparatus | — | 2012-05-22 |
| 7905995 | Alternating current rotatable sputter cathode | John R. German, Brian Meinke, Roger L. Peterson | 2011-03-15 |
| 7399385 | Alternating current rotatable sputter cathode | John R. German, Brian Meinke, Roger L. Peterson | 2008-07-15 |
| 6905579 | Cylindrical magnetron target and spindle apparatus | — | 2005-06-14 |
| 6841051 | High-power ion sputtering magnetron | — | 2005-01-11 |
| 5571393 | Magnet housing for a sputtering cathode | Clifford L. Taylor | 1996-11-05 |
| 5567289 | Rotating floating magnetron dark-space shield and cone end | Clifford L. Taylor | 1996-10-22 |
| 5539272 | Rotating floating magnetron dark-space shield | Clifford L. Taylor | 1996-07-23 |
| 5413688 | Shutter apparatus for a coating chamber viewport | — | 1995-05-09 |