| 10727034 |
Magnetic force release for sputtering sources with magnetic target materials |
Patrick Lawrence Morse |
2020-07-28 |
| 10699885 |
Dual power feed rotary sputtering cathode |
Patrick Lawrence Morse |
2020-06-30 |
| RE46599 |
Sputtering apparatus |
William A. Meredith, Jr. |
2017-11-07 |
| 9418823 |
Sputtering apparatus |
Patrick Lawrence Morse, John R. German |
2016-08-16 |
| 9406487 |
Plasma enhanced chemical vapor deposition (PECVD) source |
Patrick Lawrence Morse, William A. Meredith, Jr., John R. German, Michelle Lynn Neal |
2016-08-02 |
| 9312108 |
Sputtering apparatus |
Patrick Lawrence Morse, John R. German, William A. Meredith, Jr. |
2016-04-12 |
| 8900428 |
Sputtering apparatus |
William A. Meredith, Jr. |
2014-12-02 |
| 8182662 |
Rotary cathode for magnetron sputtering apparatus |
— |
2012-05-22 |
| 7905995 |
Alternating current rotatable sputter cathode |
John R. German, Brian Meinke, Roger L. Peterson |
2011-03-15 |
| 7399385 |
Alternating current rotatable sputter cathode |
John R. German, Brian Meinke, Roger L. Peterson |
2008-07-15 |
| 6905579 |
Cylindrical magnetron target and spindle apparatus |
— |
2005-06-14 |
| 6841051 |
High-power ion sputtering magnetron |
— |
2005-01-11 |
| 5571393 |
Magnet housing for a sputtering cathode |
Clifford L. Taylor |
1996-11-05 |
| 5567289 |
Rotating floating magnetron dark-space shield and cone end |
Clifford L. Taylor |
1996-10-22 |
| 5539272 |
Rotating floating magnetron dark-space shield |
Clifford L. Taylor |
1996-07-23 |
| 5413688 |
Shutter apparatus for a coating chamber viewport |
— |
1995-05-09 |
