Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6235172 | System for and method of providing a controlled deposition on wafers | Peter J. Clarke | 2001-05-22 |
| 6176987 | System for and method of providing a controlled deposition of wafers | Peter J. Clarke | 2001-01-23 |
| 6149367 | End effector assembly for inclusion in a system for producing uniform deposits on a wafer | — | 2000-11-21 |
| 6135051 | End effector assembly for inclusion in a system for producing uniform deposits on a wafer | — | 2000-10-24 |
| 6117238 | End effector assembly for inclusion in a system for producing uniform deposits on a wafer | — | 2000-09-12 |
| 6083357 | System for and method of providing a controlled deposition on wafers | Peter J. Clarke | 2000-07-04 |
| 6059517 | End effector assembly for inclusion in a system for producing uniform deposits on a wafer | — | 2000-05-09 |
| 6051066 | End effector assembly for inclusion in a system for producing uniform deposits on a wafer | — | 2000-04-18 |
| 5881668 | System for providing a controlled deposition on wafers | Peter J. Clarke | 1999-03-16 |
| 5882403 | System for providing a controlled deposition on wafers | Peter J. Clarke | 1999-03-16 |
| 5879460 | System for providing a controlled deposition on wafers | Peter J. Clarke | 1999-03-09 |
| 5868099 | Page clamping device | — | 1999-02-09 |
| 5858101 | System providing a controlled deposition of wafers | Peter J. Clarke | 1999-01-12 |
| 5830272 | System for and method of providing a controlled deposition on wafers | Peter J. Clarke | 1998-11-03 |
| 5759268 | System for providing a controlled deposition on wafers | Peter J. Clarke | 1998-06-02 |
| 5310410 | Method for processing semi-conductor wafers in a multiple vacuum and non-vacuum chamber apparatus | Peter J. Clarke | 1994-05-10 |