| 6235172 |
System for and method of providing a controlled deposition on wafers |
Peter J. Clarke |
2001-05-22 |
| 6176987 |
System for and method of providing a controlled deposition of wafers |
Peter J. Clarke |
2001-01-23 |
| 6149367 |
End effector assembly for inclusion in a system for producing uniform deposits on a wafer |
— |
2000-11-21 |
| 6135051 |
End effector assembly for inclusion in a system for producing uniform deposits on a wafer |
— |
2000-10-24 |
| 6117238 |
End effector assembly for inclusion in a system for producing uniform deposits on a wafer |
— |
2000-09-12 |
| 6083357 |
System for and method of providing a controlled deposition on wafers |
Peter J. Clarke |
2000-07-04 |
| 6059517 |
End effector assembly for inclusion in a system for producing uniform deposits on a wafer |
— |
2000-05-09 |
| 6051066 |
End effector assembly for inclusion in a system for producing uniform deposits on a wafer |
— |
2000-04-18 |
| 5881668 |
System for providing a controlled deposition on wafers |
Peter J. Clarke |
1999-03-16 |
| 5882403 |
System for providing a controlled deposition on wafers |
Peter J. Clarke |
1999-03-16 |
| 5879460 |
System for providing a controlled deposition on wafers |
Peter J. Clarke |
1999-03-09 |
| 5868099 |
Page clamping device |
— |
1999-02-09 |
| 5858101 |
System providing a controlled deposition of wafers |
Peter J. Clarke |
1999-01-12 |
| 5830272 |
System for and method of providing a controlled deposition on wafers |
Peter J. Clarke |
1998-11-03 |
| 5759268 |
System for providing a controlled deposition on wafers |
Peter J. Clarke |
1998-06-02 |
| 5310410 |
Method for processing semi-conductor wafers in a multiple vacuum and non-vacuum chamber apparatus |
Peter J. Clarke |
1994-05-10 |