Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6296546 | Index table and drive mechanism for a chemical mechanical planarization machine | Robert F. Allen | 2001-10-02 |
| 6292708 | Distributed control system for a semiconductor wafer processing machine | Robert F. Allen | 2001-09-18 |
| 6190118 | Tilt mechanism for wafer cassette | Robert F. Allen | 2001-02-20 |
| 6033521 | Tilt mechanism for wafer cassette | Robert F. Allen | 2000-03-07 |
| 5975986 | Index table and drive mechanism for a chemical mechanical planarization machine | Robert F. Allen | 1999-11-02 |