Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6678911 | Multiple vertical wafer cleaner | Yakov Epshteyn, Ellis Harvey | 2004-01-20 |
| 6461441 | Method of removing debris from cleaning pads in work piece cleaning equipment | Yakov Epshteyn, Ellis Harvey | 2002-10-08 |