TS

Takamitsu Shimoide

SC Speedfam Co.: 1 patents #48 of 105Top 50%
📍 Ayase, JP: #223 of 339 inventorsTop 70%
Overall (All Time): #3,615,236 of 4,157,543Top 90%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6062949 Polishing amount control system and method for same Hiroshi Yashiki, Katsunori Nagao, Akihiko Yamaya 2000-05-16