Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8440557 | Method for fabricating a semiconductor device by considering the extinction coefficient during etching of an interlayer insulating film | Seiji Yokoyama, Sinichi Imada | 2013-05-14 |
| 7781320 | Method for fabricating a semiconductor device by considering the extinction coefficient during etching of an interlayer insulating film | Seiji Yokoyama, Shinichi Imada | 2010-08-24 |