Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6787457 | Method of etching and anti-reflection film using substituted hydrocarbon with halogen gas | Masatsugu Ikeda, Kenichi Kubo, Youichi Goto | 2004-09-07 |
| 6562736 | Manufacturing method for semiconductor device | Hideo Yamagata, Takeyoshi Koumoto | 2003-05-13 |
| 5843848 | Method of plasma etching | — | 1998-12-01 |