Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6022672 | Method of manufacturing semiconductors having improved temperature control | — | 2000-02-08 |
| 5840445 | Method of manufacturing a self-aligned phase-shifting mask | — | 1998-11-24 |
| 5821035 | Resist developing apparatus and resist developing method | Harunobu Hirano, Yasushi Kusano, Ritsuko Inoue | 1998-10-13 |
| 5473219 | Field emission type flat display apparatus | — | 1995-12-05 |
| 5395649 | Spin coating apparatus for film formation over substrate | — | 1995-03-07 |
| 5378963 | Field emission type flat display apparatus | — | 1995-01-03 |
| 5342738 | Resist film developing method and an apparatus for carrying out the same | — | 1994-08-30 |