Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6032544 | Automated particle monitor for a thin film process | Cheryl Diane Harwell | 2000-03-07 |
| 5942672 | Automated particle monitor operation for a thin film process | Cheryl Diane Harwell | 1999-08-24 |