Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7617593 | Micromachine and method of fabricating the same | — | 2009-11-17 |
| 7578186 | Inertial sensor and fabrication method of inertial sensor | — | 2009-08-25 |
| 7469603 | Angular velocity detector, method of detection of angular velocities using angular velocity detector, and method of fabricating angular velocity detector | Masaya Nagata, Hiroshi Nishitake, Koji Fukumoto, Atsuhito Yasui | 2008-12-30 |
| 7451647 | MEMS sensor driving device, MEMS sensor driving method, and active sensor using MEMS | Koji Fukumoto, Masaya Nagata, Atsuhito Yasui | 2008-11-18 |
| 7102268 | Micromachine and method of fabricating the same | — | 2006-09-05 |