| 7902610 |
Semiconductor device and method for manufacturing same |
Masanori Tsukamoto, Masashi Nakata, Itaru Oshiyama |
2011-03-08 |
| 7714393 |
Semiconductor device and method for manufacturing same |
Masanori Tsukamoto, Masashi Nakata, Itaru Oshiyama |
2010-05-11 |
| 7391089 |
Semiconductor device and method of manufacturing the same |
Shinpei Yamaguchi, Tomoyuki Hirano |
2008-06-24 |
| 7141501 |
Polishing method, polishing apparatus, and method of manufacturing semiconductor device |
Hiroshi Horikoshi, Takeshi Nogami, Shuzo Sato, Shingo Takahashi, Naoki Komai +1 more |
2006-11-28 |
| 7105458 |
Method of etching semiconductor devices using a hydrogen peroxide-water mixture |
— |
2006-09-12 |
| 7088610 |
Magnetic memory apparatus and method of manufacturing magnetic memory apparatus |
— |
2006-08-08 |
| 7033943 |
Etching solution, etching method and method for manufacturing semiconductor device |
Hiizu Ohtorii, Hiroshi Horikoshi, Naoki Komai, Shuzo Sato |
2006-04-25 |
| 6686277 |
Method of manufacturing semiconductor device |
— |
2004-02-03 |
| 6586321 |
Method for forming metal silicide layer |
— |
2003-07-01 |
| 6291346 |
Titanium silicide layer formation method |
— |
2001-09-18 |