Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5786605 | Semiconductor device produced by a single furnace cycle diffusion and oxidation process | — | 1998-07-28 |
| 5494852 | High capacity semiconductor dopant deposition/oxidization process using a single furnace cycle | — | 1996-02-27 |
| 5429704 | Etching tool | Charles Anders Butler | 1995-07-04 |
| 5372649 | Apparatus for weighting a diffusion furnace cantilever | — | 1994-12-13 |