Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5725974 | Method and apparatus for producing scanning data used to produce a photomask | — | 1998-03-10 |
| 5634980 | Method for washing substrates | Manabu Tomita, Yoshiaki Honda | 1997-06-03 |
| 5202204 | Process of producing exposure mask | Takehiko Gunji, Satoru Nozawa | 1993-04-13 |