Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7517638 | Method of manufacturing a semiconductor apparatus with a tapered aperture pattern to form a predetermined line width | — | 2009-04-14 |
| 6953746 | Method of manufacturing a semiconductor apparatus with a tapered aperture pattern to form a predetermined line width | — | 2005-10-11 |
| 6716747 | Method of manufacturing a semiconductor apparatus with a tapered aperture pattern to form a predetermined line width | — | 2004-04-06 |
| 6177233 | Method of forming resist pattern | — | 2001-01-23 |
| 5397663 | Phase shift mask and method of manufacturing the same | Michio Negishi, Hideo Shimizu | 1995-03-14 |