| 11588061 |
Photoelectric conversion module and method for manufacturing photoelectric conversion module |
Nobutaka Yoneyama, Mikio HAMANO, Yoshihide Miyagawa, Toshiaki Yamaura, Manabu Tanaka |
2023-02-21 |
| 9472698 |
Method of manufacturing compound thin-film photovoltaic cell |
— |
2016-10-18 |
| 9297287 |
Exhaust gas control apparatus and control method for exhaust gas control apparatus |
Shinya Hirota, Shunsuke Toshioka, Akira Mikami, Koichiro Fukuda, Sakutaro Hoshi +8 more |
2016-03-29 |
| 7790521 |
Thin film semiconductor device, method of manufacturing the same and display |
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2010-09-07 |
| 7550326 |
Method for manufacturing thin film device and semiconductor device |
Tomoatsu Kinoshita |
2009-06-23 |
| 7179693 |
Method for manufacturing thin film device that includes a chemical etchant process |
Tomoatsu Kinoshita |
2007-02-20 |
| 7172708 |
Process for the fabrication of thin-film device and thin-film device |
Tomoatsu Kinoshita |
2007-02-06 |
| 6916681 |
Method for manufacturing thin film device and semiconductor device using a third substrate |
Tomoatsu Kinoshita |
2005-07-12 |
| 6741621 |
Laser irradiation apparatus and method of treating semiconductor thin film |
— |
2004-05-25 |
| 6693258 |
Process for producing thin film semiconductor device and laser irradiation apparatus |
Yukiyasu Sugano, Masahiro Fujino, Michio Mano, Masumitsu Ino, Takenobu Urazono +1 more |
2004-02-17 |
| 6632711 |
Process for producing thin film semiconductor device and laser irradiation apparatus |
Yukiyasu Sugano, Masahiro Fujino, Michio Mano, Masumitsu Ino, Takenobu Urazono +1 more |
2003-10-14 |
| 5456764 |
Solar cell and a method for the manufacture thereof |
Yukimi Ichikawa |
1995-10-10 |
| 5409867 |
Method of producing polycrystalline semiconductor thin film |
— |
1995-04-25 |
| 5061322 |
Method of producing p-type amorphous silicon carbide and solar cell including same |
— |
1991-10-29 |
| 4968384 |
Method of producing carbon-doped amorphous silicon thin film |
— |
1990-11-06 |