Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797323 | Method of forming silicon oxide layer | Kazuhiko Tokunaga, Toshihiko Suzuki, Hideki Kimura, Toyotaka Kataoka, Atsushi Suzuki +1 more | 2004-09-28 |
| 6589349 | Apparatus for forming silicon oxide film and method of forming silicon oxide film | Toyotaka Kataoka, Toshihiko Suzuki | 2003-07-08 |
| 6297172 | Method of forming oxide film | — | 2001-10-02 |
| 6239044 | Apparatus for forming silicon oxide film and method of forming silicon oxide film | Toyotaka Kataoka, Toshihiko Suzuki | 2001-05-29 |
| 5854505 | Process for forming silicon oxide film and gate oxide film for MOS transistors | Atsushi Suzuki, Kazuhiko Tokunaga, Toshihiko Suzuki | 1998-12-29 |
| 5506178 | Process for forming gate silicon oxide film for MOS transistors | Atsushi Suzuki, Kazuhiko Tokunaga, Toshihiko Suzuki | 1996-04-09 |