| 5021221 |
Apparatus for producing high purity silicon from flames of sodium and silicon tetrachloride |
Robert K. Gould |
1991-06-04 |
| 4910153 |
Deposition feedstock and dopant materials useful in the fabrication of hydrogenated amorphous silicon alloys for photovoltaic devices and other semiconductor devices |
— |
1990-03-20 |
| 4892592 |
Thin film semiconductor solar cell array and method of making |
Barry James Johnson, David B. Gerhardt |
1990-01-09 |
| 4854974 |
Electrical contacts for a thin-film semiconductor device |
David E. Carlson, Robert V. D'Aiello |
1989-08-08 |
| 4783421 |
Method for manufacturing electrical contacts for a thin-film semiconductor device |
David E. Carlson, Robert V. D'Aiello |
1988-11-08 |
| 4690830 |
Activation by dehydrogenation or dehalogenation of deposition feedstock and dopant materials useful in the fabrication of hydrogenated amorphous silicon alloys for photovoltaic devices and other semiconductor devices |
David E. Carlson |
1987-09-01 |
| 4568437 |
Method and apparatus for forming disilane |
— |
1986-02-04 |