Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6576065 | Installation and method for chemical treatment of microelectronics wafers | — | 2003-06-10 |
| 6468879 | Method and device for separating a plate of material, in particular semiconductor material, into two wafers | Francois Lissalde | 2002-10-22 |
| 5084624 | Apparatus for making homogeneous the implantation of ions on the surface of planar samples | Jean-Francois Michaud | 1992-01-28 |