Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7282421 | Methods for reducing a thickness variation of a nitride layer formed in a shallow trench isolation CMP process and for forming a device isolation film of a semiconductor device | Yong-Soo Choi, Hyuk-Jin Kwon, Sang Hwa Lee, Geun Min Choi, Gyu Han Yoon | 2007-10-16 |