Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12025912 | Phase shift mask for EUV lithography and manufacturing method for the phase shift mask | — | 2024-07-02 |
| 10338464 | Photomask including transfer patterns for reducing a thermal stress | — | 2019-07-02 |
| 10036950 | Photomask blank and photomask for suppressing heat absorption | — | 2018-07-31 |
| 9846358 | Photomask including transfer patterns for reducing a thermal stress | — | 2017-12-19 |
| 9612524 | Reflective mask and method of fabricating the same | In Hwan Lee, Sun Young Koo, Seo Min Kim, Yong Dae Kim, Jin-Soo Kim +4 more | 2017-04-04 |
| 9454073 | Photomask blank and photomask for suppressing heat absorption | — | 2016-09-27 |
| 7993802 | Method for correcting pattern critical dimension in photomask | — | 2011-08-09 |
| 7955760 | Method of correcting defect in photomask | Hee Chun Kim | 2011-06-07 |
| 7901844 | Method with correction of hard mask pattern critical dimension for fabricating photomask | — | 2011-03-08 |
| 7901849 | Photomask and method of fabricating the same | — | 2011-03-08 |
| 7670728 | Method for repairing bridge in photo mask | — | 2010-03-02 |