Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6855632 | Cu film deposition equipment of semiconductor device | Si Bum Kim | 2005-02-15 |
| 6664636 | Cu film deposition equipment of semiconductor device | Si Bum Kim | 2003-12-16 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6855632 | Cu film deposition equipment of semiconductor device | Si Bum Kim | 2005-02-15 |
| 6664636 | Cu film deposition equipment of semiconductor device | Si Bum Kim | 2003-12-16 |