Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10788745 | Photomasks including shading layer and methods of forming patterns using the same | — | 2020-09-29 |
| 8409770 | Blank mask and method of fabricating mask using the same | — | 2013-04-02 |
| 7727684 | Mask and manufacturing method thereof | — | 2010-06-01 |
| 7629093 | Method for correcting critical dimension of mask pattern | — | 2009-12-08 |