Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8257886 | Phase shift mask with enhanced resolution and method for fabricating the same | — | 2012-09-04 |
| 7799488 | Method for manufacturing phase shift mask using electron beam lithography | Ho-Yong Jung | 2010-09-21 |