Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8771527 | Method of manufacturing an extreme ultraviolet mask | — | 2014-07-08 |
| 8329362 | Extreme ultraviolet mask | — | 2012-12-11 |
| 8250496 | Method for transferring self-assembled dummy pattern to substrate | — | 2012-08-21 |
| 8242021 | Method for manufacturing semiconductor device | — | 2012-08-14 |
| 8216948 | Exposure mask and method for forming semiconductor device using the same | — | 2012-07-10 |
| 8197991 | Manufacturing method of a semiconductor device | — | 2012-06-12 |
| 8163190 | Method for fabricating a fine pattern | — | 2012-04-24 |
| 7964325 | Mask and method for forming a semiconductor device using the same | — | 2011-06-21 |
| 7838176 | Photo mask and method for fabricating the same | — | 2010-11-23 |
| 7838181 | Photo mask and method for manufacturing semiconductor device using the same | — | 2010-11-23 |
| 7820344 | Method for forming line pattern array, photomask having the same and semiconductor device fabricated thereby | — | 2010-10-26 |
| 7820345 | Exposure mask and a method of making a semiconductor device using the mask | — | 2010-10-26 |
| 7811722 | Photomask and method for fabricating the same | — | 2010-10-12 |
| 7774738 | Lithography method for forming a circuit pattern | — | 2010-08-10 |
| 7712070 | Method for transferring self-assembled dummy pattern to substrate | — | 2010-05-04 |
| 7546564 | Method for verifying optical proximity correction using layer versus layer comparison | — | 2009-06-09 |