Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8884436 | Semiconductor device, memory system and method of manufacturing the semiconductor device | — | 2014-11-11 |
| 8444867 | Method for fabricating patterns on a wafer through an exposure process | — | 2013-05-21 |
| RE44221 | Method for verifying mask pattern of semiconductor device | — | 2013-05-14 |
| 8298956 | Method for fabricating fine pattern | — | 2012-10-30 |
| 8029949 | Photomask for forming contact hole in semiconductor device | Dong Sook Chang | 2011-10-04 |
| 7993814 | Method for forming patterns using single mask | — | 2011-08-09 |
| 7932998 | Exposure apparatus having the same ID bias | — | 2011-04-26 |
| 7752584 | Method for verifying mask pattern of semiconductor device | — | 2010-07-06 |
| 6387759 | Method of fabricating a semiconductor device | Jeong Soo Park, Wouns Yang | 2002-05-14 |
| 6365302 | Pattern for measuring focus of light exposing apparatus and method thereof | — | 2002-04-02 |
| 6218082 | Method for patterning a photoresist | — | 2001-04-17 |
| 5888674 | Method of manufacturing a halftone phase shift mask | Byung Chan Kim | 1999-03-30 |