Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10026166 | Methods of detecting defects in registration controlled photomasks | — | 2018-07-17 |
| 9739723 | Methods of defect inspection for photomasks | Mun Sik Kim | 2017-08-22 |
| 8187774 | Mask for EUV lithography and method for exposure using the same | — | 2012-05-29 |
| 8021802 | Phase shift mask for double patterning and method for exposing wafer using the same | — | 2011-09-20 |
| 7771900 | Manufacturing method for photo mask | — | 2010-08-10 |