Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7105883 | Semiconductor device | — | 2006-09-12 |
| 6902983 | Method for manufacturing semiconductor device and capacitor | — | 2005-06-07 |
| 6900095 | Hydrogen barrier layer and method for fabricating semiconductor device having the same | — | 2005-05-31 |
| 6864191 | Hydrogen barrier layer and method for fabricating semiconductor device having the same | — | 2005-03-08 |
| 6818522 | Method for forming capacitor of semiconductor device with RuTiN and RuTiO diffusion barrier | — | 2004-11-16 |
| 6764899 | Method for fabricating semiconductor device | — | 2004-07-20 |
| 6706627 | Method of manufacturing capacitor with a diffusion barrier containing ruthenium, titanium and nitrogen | — | 2004-03-16 |