Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9726970 | Method of fabricating reflective photomask | — | 2017-08-08 |
| 8795931 | Reflection-type photomasks and methods of fabricating the same | Yong Dae Kim | 2014-08-05 |
| 8455159 | Method for correcting critical dimension of phase shift mask and method for manufacturing the same | — | 2013-06-04 |