Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8507665 | Template derivative for forming ultra-low dielectric layer and method of forming ultra-low dielectric layer using the same | Sung-Kyu Min, Ja Chun Ku, Sang Tae Ahn, Hyeon Ju An, Hyo-Seok Lee +2 more | 2013-08-13 |
| 8354350 | Template derivative for forming ultra-low dielectric layer and method of forming ultra-low dielectric layer using the same | Sung-Kyu Min, Ja Chun Ku, Sang Tae Ahn, Hyeon Ju An, Hyo-Seok Lee +2 more | 2013-01-15 |
| 8202807 | Template derivative for forming ultra-low dielectric layer and method of forming ultra-low dielectric layer using the same | Sung-Kyu Min, Ja Chun Ku, Chan Bae Kim, Sang Tae Ahn, Hyeon Ju An +2 more | 2012-06-19 |
| 7846843 | Method for manufacturing a semiconductor device using a spacer as an etch mask for forming a fine pattern | Jong Min Lee, Chan Bae Kim, Hyeon Ju An, Hyo-Seok Lee, Sung-Kyu Min | 2010-12-07 |
| 7439177 | Method of manufacturing semiconductor device for improving contact hole filling characteristics while reducing parasitic capacitance of inter-metal dielectric | Chan Bae Kim | 2008-10-21 |