Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7799179 | Sputtering cathode and device and method for coating a substrate with several layers | Wolfram Maass, Roland Schneider, Uwe MÜHLFELD, Berthold Ocker, Jürgen Langer +8 more | 2010-09-21 |