| 9988739 |
Method for pulling a single crystal composed of silicon from a melt contained in a crucible, and single crystal produced thereby |
Erich Gmeilbauer, Martin Weber |
2018-06-05 |
| 7341787 |
Process for producing highly doped semiconductor wafers, and dislocation-free highly doped semiconductor wafers |
Rupert Krautbauer, Erich Gmeilbauer, Martin Weber |
2008-03-11 |
| 7070649 |
Process for producing a silicon single crystal which is doped with highly volatile foreign substances |
Martin Weber, Peter Vilzmann, Erich Gmeilbauer |
2006-07-04 |
| 6660082 |
Method and apparatus for doping a melt with a dopant |
Martin Weber, Erich Gmeilbauer, Walter Neumaier, Peter Vilzmann |
2003-12-09 |
| 6461582 |
Single-crystal rod and process for its production |
Martin Weber, Erich Gmeilbauer, Alfred Miller |
2002-10-08 |
| 6283837 |
Grinding machine |
— |
2001-09-04 |